D6F Series MEMS Flow Sensors

Omron Electronics D6F MEMS Flow Sensors and Velocity Sensors are compact, highly reliable sensors with a unique cyclone flow structure that diverts particulate from the sensor element. As an alternative to differential pressure sensing or for detecting clogged filters, the D6F series is available in PCB-mounted, flange-mount, and connector models. The D6F-P 0.1 LPM version MEMS Flow Sensor is targeted at ultra low-flow applications and measures up to 200 LPM with a bypass set-up.

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Description Datasheet Availability Pricing (CAD) Filter the results in the table by unit price based on your quantity.
Qty. RoHS ECAD Model Type
For Use With
Range
Accuracy
Output Voltage
Operating Supply Voltage
Port Size
Housing Material

Omron Electronics Flow Sensors MEMS Flow Flange Mt 0-0.1 LPM PCB Term
Datasheet
319In Stock
Min.: 1
Mult.: 1

MEMS Air Flow Sensor Air 0 L/min to 0.1 L/min 2 % 4 V 4.75 V to 9.45 V Polybutylene Terephthalate (PBT)
Omron Electronics Flow Sensors MEMS Airflow Sensor Air 0-10 LPM
Datasheet
27In Stock
Min.: 1
Mult.: 1

MEMS Mass Flow Sensor Air 0 L/min to 10 L/min 3 % 1 V to 5 V 10.8 V to 26.4 V Thermoplastic (TP)
Omron Electronics Flow Sensors MEMS FLOW SENSOR
Datasheet
8In Stock
Min.: 1
Mult.: 1

MEMS Flow Sensor Air 0 L/min to 50 L/min 3 % 3 V to 3.6 V 18 mm Polyphenylene Sulfide (PPS)
Omron Electronics Flow Sensors MEMS Velocity Sensor Air 0-3m/Sec
Datasheet
605In Stock
Min.: 1
Mult.: 1

Air Velocity Sensor Air 0 m/s to 3 m/s 10 % 0 V to 2 V 3.15 V to 9.45 V 2 mm x 3 mm Thermoplastic (TP)
Omron Electronics Flow Sensors MEMS MassFlow Sensor Air 0-1 LPM PCB Ter
Datasheet
1,146In Stock
1,075Expected 2026-10-30
Min.: 1
Mult.: 1

Mass Air Flow Sensor Air 0 L/min to 1 L/min 4.75 V to 9.45 V Polybutylene Terephthalate (PBT)

Omron Electronics Flow Sensors MatingCable for MEMS FlowSns D6F-03A3-000
Datasheet
314In Stock
Min.: 1
Mult.: 1

Accessory, Cable Cable for MEMS Mass Flow Sensor D6F-03A3-000 1 V to 5 V

Omron Electronics Flow Sensors MEMS Mass FlowSensor Air 0-1LPM Connecto
Datasheet
253In Stock
325Expected 2026-11-06
Min.: 1
Mult.: 1

Mass Air Flow Sensor Air 0 L/min to 1 L/min 0 V to 3.1 V 4.75 V to 9.45 V Polybutylene Terephthalate (PBT)
Omron Electronics Flow Sensors MEMS Velocity Sensor Air 0-1 Meter/Sec
Datasheet
87In Stock
60Expected 2026-09-14
Min.: 1
Mult.: 1

Air Velocity Sensor Air 0 m/s to 1 m/s 5 % 1 V to 5 V 10.8 V to 26.4 V 2.6 mm x 5 mm Polyphenylene Sulfide (PPS)
Omron Electronics Flow Sensors MEMS Velocity Sensor Air 0-4 Meter/Sec
Datasheet
104In Stock
175Expected 2026-09-17
Min.: 1
Mult.: 1

Air Velocity Sensor Air 0 m/s to 4 m/s 5 % 1 V to 5 V 10.8 V to 26.4 V 2.6 mm x 5 mm Polyphenylene Sulfide (PPS)
Omron Electronics Flow Sensors MEMS Velocity Sensor 10m/sec
Datasheet
62In Stock
Min.: 1
Mult.: 1

Air Velocity Sensor Air 0 m/s to 10 m/s 5 % 6 V 10.8 V to 26.4 V 2.6 mm x 5 mm Polyphenylene Sulfide (PPS)
Omron Electronics Flow Sensors MEMS air 0-10L/min
Datasheet
4In Stock
5Expected 2026-10-30
Min.: 1
Mult.: 1

MEMS Mass Flow Sensor Air 0 L/min to 10 L/min 3 % 1 V to 5 V 10.8 V to 26.4 V 5 mm Thermoplastic (TP), Aluminum alloy
Omron Electronics Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR
Datasheet
2In Stock
35Expected 2026-10-30
Min.: 1
Mult.: 1

MEMS Mass Flow Sensor Air 0 L/min to 20 L/min 3 % 1 V to 5 V 10.8 V to 26.4 V 6.35 mm Thermoplastic (TP), Aluminum alloy
Omron Electronics Flow Sensors MEMS Airflow Sensor Air 0-20 LPM
Datasheet
2In Stock
2Expected 2027-03-02
Min.: 1
Mult.: 1

MEMS Mass Flow Sensor Air 0 L/min to 20 L/min 3 % 1 V to 5 V 10.8 V to 26.4 V Thermoplastic (TP)
Omron Electronics Flow Sensors MEMS FLOW SENSOR
Datasheet
6In Stock
Min.: 1
Mult.: 1

MEMS Flow Sensor Air 0 L/min to 20 L/min 5 % 3 V to 3.6 V 13 mm Polyphenylene Sulfide (PPS)
Omron Electronics Flow Sensors Cable for D6F-P MEMS Flow Sensors
Datasheet
83In Stock
102Expected 2026-11-06
Min.: 1
Mult.: 1

Accessory, Cable Cable for MEMS Air Flow Sensor D6F-10A, -20A, -50A
Omron Electronics Flow Sensors CABLE FOR D6F
Datasheet
39In Stock
Min.: 1
Mult.: 1
Accessory, Cable MEMS Flow Sensor

Omron Electronics Flow Sensors MEMS Flow Sensor Manifold Mount
Datasheet
28In Stock
65Expected 2026-09-16
Min.: 1
Mult.: 1

MEMS Air Flow Sensor Air 0 L/min to 1 L/min 2 % 4 V 4.75 V to 9.45 V Polybutylene Terephthalate (PBT)
Omron Electronics Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR
Datasheet
43Expected 2026-11-20
Min.: 1
Mult.: 1

MEMS Mass Flow Sensor Air 0 L/min to 10 L/min 3 % 1 V to 5 V 10.8 V to 26.4 V 6.35 mm Thermoplastic (TP), Aluminum alloy
Omron Electronics Flow Sensors MEMS FLOW SENSOR
Datasheet
10Expected 2026-09-18
Min.: 1
Mult.: 1

MEMS Flow Sensor Air 0 L/min to 10 L/min 5 % 3 V to 3.6 V 13 mm Polyphenylene Sulfide (PPS)

Omron Electronics Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR
Datasheet
8Expected 2026-11-27
Min.: 1
Mult.: 1

MEMS Mass Flow Sensor Air 0 L/min to 50 L/min 3 % 1 V to 5 V 10.8 V to 26.4 V 6.35 mm Thermoplastic (TP), Aluminum alloy
Omron Electronics Flow Sensors MEMS Micro-Flow Sensor
Datasheet
Non-Stocked Lead-Time 28 Weeks
Min.: 1
Mult.: 1

Micro-Flow Sensor City Gas 0 L/min to 5 L/min 3 % 1 V to 5 V 10.8 V to 26.4 V
Omron Electronics Flow Sensors MEMS air 0-50L/min
Datasheet
Non-Stocked Lead-Time 26 Weeks
Min.: 1
Mult.: 1

MEMS Mass Flow Sensor Air 0 L/min to 50 L/min 3 % 1 V to 5 V 10.8 V to 26.4 V 5 mm Thermoplastic (TP), Aluminum alloy


Omron Electronics Flow Sensors FLOW SENSOR
Datasheet
Non-Stocked Lead-Time 26 Weeks
Min.: 1
Mult.: 1

MEMS Mass Flow Sensor Air 0 L/min to 50 L/min
Omron Electronics Flow Sensors MEMS FLOW SENSOR
Datasheet
Non-Stocked Lead-Time 26 Weeks
Min.: 1
Mult.: 1

MEMS Flow Sensor Air 0 L/min to 70 L/min 3 % 3 V to 3.6 V 18 mm Polyphenylene Sulfide (PPS)
Omron Automation and Safety D6FZ-FC03
Omron Automation and Safety Flow Sensors D6FZ-FGT Mntg Bracket
Datasheet
Non-Stocked
Min.: 1
Mult.: 1